Measurement of the EUV Test Stand (ETS) 0.1-NA projection lens, 2000

Measurement of the Engineering Test Stand (ETS) at the ALS
Measurement of the Engineering Test Stand (ETS) at ALS Beamline 12.0.1. Shown are Kenneth Goldberg, Jeffrey Bokor, Patrick Naulleau
Sharing interferogram and Fourier transform analysis of the ETS EUV Engineering Test Stand optic
EUV Lateral Shearing Interferometry at 13.4 nm wavelength, and analysis performed with the Fourier Transform method of phase retrieval in orthogonal directions. A single, two-dimensional cross-grating divides the beam. This approach is now sometimes mistakenly called Talbot Interferometry. (Originally, Talbot Interferometry was a two-grating approach.)