Measurement of the EUV Test Stand (ETS) 0.1-NA projection lens, 2000
Measurement of the Engineering Test Stand (ETS) at ALS Beamline 12.0.1. Shown are Kenneth Goldberg, Jeffrey Bokor, Patrick NaulleauEUV Lateral Shearing Interferometry at 13.4 nm wavelength, and analysis performed with the Fourier Transform method of phase retrieval in orthogonal directions. A single, two-dimensional cross-grating divides the beam. This approach is now sometimes mistakenly called Talbot Interferometry. (Originally, Talbot Interferometry was a two-grating approach.)
