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The Actinic Inspection Tool, EUV Photomask Microscope, 2004–2011

The Actinic Inspection Tool (AIT) At ALS Beamline 11.3.2, LBNL
The Actinic Inspection Tool (AIT) At ALS Beamline 11.3.2, LBNL
Improvement in the AIT imaging quality from 2005 to 2007
Improvement in the AIT imaging quality from 2005 to 2007
The AIT team in summer 2010
The AIT team in summer 2010. Iacopo Mochi, Liz Martin, Jim Macdougall, Ken Goldberg
Patterned defect array imaged with the AIT at 13.4-nm wavelength
Patterned defect array imaged with the AIT at 13.4-nm wavelength