Links to download presentations by Kenneth Goldberg. Downloads should begin automatically. Note that the files are large, and the PowerPoint files contain animations that only play in presentation mode.
2015 SPIE Photomask BACUS
EUV actinic brightfield mask microscopy for predicting defect aerial images [56 MB, PPTX]
Looking at numerous mask defects, comparing (1) SHARP Actinic imaging, (2) NXE 3100 Wafer SEMS, and (3) Reticle SEM images.
2015 SHARP Promotion
Why Sharp? [10.3 MB, PDF]
SHARP fills a gap for forward-looking, 2nd- and 3rd-generation EUVL technologies. (1) Extend beyond 0.33-NA (2) Customize the illumination for SMO and the emulation of FlexRay pupils. (3) Recover defect phase and amplitude information. (4) Anamorphic (4x/8x magnification) imaging later in 2015. (5) Image multilayer-coated "wafer masks," and masks created with experimental mask materials that may not be allowed in fabs.
2015 SPIE Advanced Lithography
New Ways of Looking at Masks with the SHARP EUV Microscope [25 MB, PPTX]
Discussion of forward-looking EUV mask research being conducted on SHARP, including ultra-high resolution, source-mask optimization, phase imaging, sub-reolution assist features (SRAF), telecentricity measurements, anamorphic imaging, and more.
2014 SHARP Promotion
SHARP: SEMATECH High-NA Actinic Reticle Review Project, December 2014 [13 MB, PPTX]
SHARP's capabilities and specifications for state of the art EUV photomask research
2014 EUVL Symposium
New Source and Imaging Capabilities of the SHARP EUV Mask Microscope [24 MB, PPTX]
Advanced imaging capabilities, phase imaging, and the future of SHARP, October 2014.
2014 Photomask Japan (PMJ)
Actinic Mask Imaging:Emulating Current and Future Litho Tools with the SHARP EUV Microscope [45 MB, PPTX]
An overview of SHARP's research and capabilities in early 2014 with an emphasis on imaging and coherence engineering, April 2014.
2014 SPIE Advanced Lithography
Actinic mask imaging: Recent results and future directionsfrom the SHARP EUV Microscope [30 MB, PPTX]
An overview of SHARP's research and capabilities from 2013 with examples of imaging at different NA values, coherent control, and tool properties, February 2014.
2013 SPIE Photomask BACUS (Best Oral Presentation Award)
The SEMATECH high-NA actinic reticle review project, an EUV mask-imaging microscope [32 MB, PDF]
SHARP imaging of mask defects and substrate roughness, tool capabilities, and coherence control demonstrations, September 2013.
2013 SPIE Advanced Lithography
Commissioning an EUV Mask Microscope for Lithography generations Reaching 8 nm [44 MB, PDF]
Introduction to the SHARP EUV mask microscope, and early demonstration of its capabilities, February 2013.
2012 ASPE--American Society for Precision Engineering
Creating an EUV Mask Microscope for Lithography generations Reaching 8 nm [44 MB, PDF]
The design and building of SHARP, with an emphasis on precision engineering, August 2012.
2011 SPIE Advanced Lithography
An EUV Fresnel zoneplate mask-imaging microscope for lithography generationsreaching 8 nm [19 MB, PDF]
The early conceptial design for an advanced EUV Mask microscope targeting EUVL generations down to almost 6 nm, with data from its predecessor, the AIT, February 2011.
2010 SRI--Synchrotron Radiation Instrumentation
At-wavelength Interferometric KB Mirror Alignment and Optimization [22 MB, PPTX]
The development and exploration of in-situ wavefront testing and alignment for the creation of diffraction-limited beamline optics.
2008 SPIE Photomask BACUS
Benchmarking EUV Mask InspectionBeyond 0.25 NA [13 MB, PPT]
Dramatic improvements and demonstration of the quality of EUV mask imaging with the AIT.
2005 SPIE Optics for EUV, X-Ray, and Gamma-Ray Astronomy II
Ultra-high-accuracy optical testing: creating diffraction-limited short-wavelength optical systems [10 MB, PPT]
An overview of EUV interferometry methods and results from numerous optics created for EUV lithography research.
2003 EUVL Symposium
At-Wavelength Interferometry of the 0.3-NA MET Optic [5 MB, PPT]
EUV interferometric testing and alignment of the MET, with comparison to visible-light interferometry.