Kenneth A. Goldberg, Ph.D., Optical Physicist Center for X-Ray Optics • Lawrence Berkeley National Laboratory Extreme Ultraviolet Optics • Ultra-High-Accuracy Interferometry • EUV Lithography EUV 'Actinic' Mask Inspection • Optical System Modeling • Synchrotron Light • Coherence

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Affiliations

CXRO
Center for X-Ray Optics

LBNL
Lawrence Berkeley
National Laboratory

ALS
Advanced Light Source

ALS UEC
Advanced Light Source
Users Executive Committee

ALS Users' Meeting
Co-Chairman
October 4-5, 2007

Advanced X-Ray
Optical Metrology
Workshop
for Nano-Focusing & Coherence Preservation
October 5, 2007

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