Kenneth A. Goldberg, Ph.D., Optical Physicist Center for X-Ray Optics • Lawrence Berkeley National Laboratory Extreme Ultraviolet Optics • Ultra-High-Accuracy Interferometry • EUV Lithography EUV 'Actinic' Mask Inspection • Optical System Modeling • Synchrotron Light • Coherence

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CXRO
Center for X-Ray Optics

LBNL
Lawrence Berkeley
National Laboratory

ALS
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Advanced Light Source
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ALS Users' Meeting
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October 4-5, 2007

Advanced X-Ray
Optical Metrology
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for Nano-Focusing & Coherence Preservation
October 5, 2007

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