Kenneth A. Goldberg, Ph.D.

Kenneth A. Goldberg, Ph.D., Optical Physicist
Center for X-Ray Optics • Lawrence Berkeley National Laboratory
Extreme Ultraviolet Optics • Ultra-High-Accuracy Interferometry • EUV Lithography
EUV 'Actinic' Mask Inspection • Optical System Modeling • Synchrotron Light • Coherence

Home

Recent Conferences
> SPIE 2008(b)
> SPIE 2008(a)
> EUVL Symposium 2007
> SPIE Photomask 2007

Research
Advanced EUV
Optical Techniques
> Interferometry
> Mask Inspection
    • AIT Overview
    • AIT Upgrades
    • AIT Results
> Optical Modeling
> EUV Lithography
> Experiment Control

Presentations
Talks • Posters

Publications
Papers • Patents

Affiliations

CXRO
Center for X-Ray Optics

LBNL
Lawrence Berkeley
National Laboratory

ALS
Advanced Light Source

ALS UEC
Advanced Light Source
Users Executive Committee

ALS Users' Meeting
Co-Chairman
October 4-5, 2007

Advanced X-Ray
Optical Metrology
Workshop
for Nano-Focusing & Coherence Preservation
October 5, 2007

ALS Beamline 12.0
> Information
> Scheduling

ALS Beamline 11.3.2
> Information

LBNL MUG
LBNL Macintosh Users

Home > Contact

CONTACT INFORMATION

1-510-495-2261 Office Phone (messages) 1-510-495-2113 Lab Phone (no messages) Please note: Email is always the best way to reach me.	Mailing Address Mail Stop 2-400, LBNL 1 Cyclotron Road Berkeley, CA 94720, USA
Center for X-Ray Optics (CXRO) Materials Sciences Division (MSD) Lawrence Berkeley National Laboratory (LBNL)